Morphology of Diamond in Radio-Frequency Thermal Plasma CVD
نویسندگان
چکیده
منابع مشابه
Thermal plasma synthesis of diamond
A numerical model was used to examine experimental data in which a gas chromatograph measured the composition of gas sampled through a 70-pn orifice in the growth substrate during atmospheric-pressure RF plasma diamond CVD. Substantial discrepancies were found between the measurements and the predicted species mole fractions at the surface, but the data were in much better accord with predicted...
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Diamond tilms were deposited with an r.f. plasma operating at atmospheric pressure. The gas composition above the growth surface was measured with a gas ch~-omatograph. Experiments were conducted over a range of methane flow rates and sut'strate t,,'r~peratt~res. Films were characterized by SEM and X-ray diffraction texture analysis. Increases in either input methane-hydrogen ratio or substrate...
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Laser micro-Raman spectroscopy is an ideal tool for assessment and characterization of various types of carbon-based materials. Due to its special optical properties (CrN) coated stainless steel substrates. NCD films have been investigated by laser micro-Raman spectroscopy. The fingerprint of diamond based materials is in the spectral region of 1000-1600 cm-1 in the first order of Raman scatter...
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 1991
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.99.669